This dataset contains the data used to create the figures within the article "Spatial periodicities inside the Talbot effect: understanding, control and applications for lithography" by Pierre Chausse and Philip Shields. The data comprises one-dimensional and two-dimensional data showing the spatial variation of the light intensity behind grating masks that are illuminated with collimated 375 nm optical radiation. The grating mask period has been varied from 600 nm to 1200 nm.