1104 36 15642 3 51101 document 15642 Data for archiveF.zip application/zip acb2a01804dae47542bf7cf85049f570 MD5 15464661 2022-01-21 12:12:51 https://researchdata.bath.ac.uk/1104/1/Data%20for%20archiveF.zip 1104 1 1 application/zip other Datasets underpinning manuscript "Optimisation of processing conditions during CVD growth of 2D WS2 films from a chloride precursor" en public cc_by

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data 15643 3 51103 document 15643 README.txt text/plain 4b687eef14ae3915019fa4080e0a202b MD5 1919 2022-01-21 12:14:18 https://researchdata.bath.ac.uk/1104/2/README.txt 1104 2 2 text/plain other README file describing the data formatting in the file data for archiveF.zip en public

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documentation 15644 1 51110 document 15644 indexcodes.txt text/plain 716343db4c5c77150815b05b1ce2a341 MD5 402 2022-01-21 12:25:26 https://researchdata.bath.ac.uk/1104/3/indexcodes.txt 1104 3 3 text/plain other Generate index codes conversion from other to indexcodes en public

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http://eprints.org/relation/isVersionOf https://researchdata.bath.ac.uk/id/document/15643 http://eprints.org/relation/isVolatileVersionOf https://researchdata.bath.ac.uk/id/document/15643 http://eprints.org/relation/isIndexCodesVersionOf https://researchdata.bath.ac.uk/id/document/15643 archive 14 disk0/00/00/11/04 2022-01-24 13:29:57 2024-07-22 10:45:13 2022-01-24 13:29:57 data_collection show Campbell William W.Campbell@bath.ac.uk University of Bath TRUE Reale Francesco francesco.reale@oxisnt.com Oxford Instruments FALSE Ravi Sundaram ravi.sundaram@oxinst.com Oxford Instruments FALSE Bending Simon S.Bending@bath.ac.uk 0000-0002-4474-2554 University of Bath FALSE EA0030 EA0040 GE0030 HH0030 HH0050 dept_physics Monolayer CVD growth, WS2, Transition Metal Dichalcogenides, Raman Spectra, Photoluminescence, Wet Transfer All data uploaded as readily accessible text or Excel files. The dataset represents the results of a CVD growth study of monolayer WS2 films on sapphire substrates and underpins the figures in the main manuscript of "Optimisation of processing conditions during CVD growth of 2D WS2 films from a chloride precursor" that has appeared in the Journal of Materials Science. The manuscript describes an annealing protocol that was developed for the Oxford Instruments Nanofab cold wall CVD reactor to optimise the optical properties of the films. The improvement in quality is demonstrated through a systematic analysis of Raman and photoluminescence spectra and line shapes, including 2D maps generated across large area samples. Atomic force microscopy is used to confirm that the films are indeed uniform single monolayers. Finally, a wet transfer process from sapphire to Si/SiO2 substrates is used to demonstrate that the quality of the films remains unaffected. 2022-01-03 University of Bath public RightsHolder University of Bath RightsHolder Oxford Instruments Plasma Technology Engineering and Physical Sciences Research Council https://doi.org/10.13039/501100000266 EP/L015544/1 EPSRC Centre for Doctoral Training in Condensed Matter Physics cent_nan cent_cmpcdt Data either represent the raw experimental datafiles as captured with our measurement apparatus, or parameters extracted directly from these raw data files using standard fitting practices. Samples were grown in an Oxford Instruments Nanofab cold-wall CVD reactor. Raman and photoluminescence data were collected using a Renishaw inVia confocal Raman microscope and AFM images were captured with an Asylum MFP-3D atomic force microscope in non-contact mode. 2017-10-01 2020-12-31 en 1 10.15125/BATH-01104 https://doi.org/10.1007/s10853-021-06708-1 pub MC2 - Material and Chemical Characterisation 10e71d8f-567b-43e7-99f6-a3a6e73cab95 David Bullett Nanofabrication Facility 91ea5584-75f9-4093-ad28-b038c72e906b open