Fabrication of high-aspect ratio GaN nanostructures for advanced photonic devices

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data archive 3087 disk0/00/00/01/54 2016-04-14 12:37:59 2024-07-18 12:31:34 2016-04-14 12:37:59 data_collection show Le Boulbar Emmanuel elb43@bath.ac.uk 0000-0001-6364-3976 University of Bath TRUE Lewins Christopher C.J.Lewins@bath.ac.uk University of Bath FALSE Allsopp Duncan D.Allsopp@bath.ac.uk 0000-0003-4197-9852 University of Bath FALSE Bowen Chris C.R.Bowen@bath.ac.uk 0000-0002-5880-9131 University of Bath FALSE Shields Philip P.Shields@bath.ac.uk 0000-0003-0517-132X University of Bath FALSE Researcher Shields Philip P.Shields@bath.ac.uk 0000-0003-0517-132X University of Bath Researcher Allsopp Duncan D.Allsopp@bath.ac.uk 0000-0003-4197-9852 University of Bath Researcher Bowen Chris C.R.Bowen@bath.ac.uk 0000-0002-5880-9131 University of Bath DataCollector Lewins Christopher C.J.Lewins@bath.ac.uk University of Bath Fabrication of high-aspect ratio GaN nanostructures for advanced photonic devices EA0040 HH0030 HH0050 JB0030 dept_elec_eng dept_mech_eng This dataset is the result of an investigation into the impact of the temperature and pressure on the fabrication of Gallium Nitride nanostructures. The dataset contains data acquired from etched nanorods and nanopores.The data was acquired using a Hitachi S-4300 scanning electron microscope (SEM). The secondary electron (SE) images were produced using the manufacturer-supplied software. Figure numbers in the data file descriptions refer to the Microelectronic Engineering article by Le Boulbar et al. (2016) referenced in the related publications section. 2016-04 University of Bath public The ability to manipulate and guide light is crucial for the fabrication of photonic circuit. The behaviour of the light within a nanostructure is complex and manipulating light often require to accurately tune the dimension and the shape of the nanostructure. Semiconducting material such as Gallium Nitride (GaN) nanostructures could be used as building blocks to fabricate active and passive components for photonic circuit, such has core-shell light emitting diode and non-linear photonic-diode. Understanding the top-down fabrication process and controlling the profile of nanostructures is crucial to achieve and design appropriate devices characteristics. We investigated the impact of the temperature and the pressure on the profile of Inductively Coupled Plasma (ICP) etched Gallium Nitride nanorods and nanopores arrays. The nanostructure arrays were characterized via Secondary Electron Microscopy. We used the Secondary Electron images collected to extract the dimensions of the etched nanorods and nanopores. Our results show a threshold in the etch behaviour at a temperature of 125°C, which greatly enhanced the verticality of the GaN nanorods, whilst the modification of the pressure enables a fine tuning of the nanorod profile. RightsHolder University of Bath Engineering and Physical Sciences Research Council https://doi.org/10.13039/501100000266 EP/I012591/1 Lighting the Future Engineering and Physical Sciences Research Council https://doi.org/10.13039/501100000266 EP/M015181/1 Manufacturing of Nano-Engineered III-Nitride Semiconductors Seventh Framework Programme https://doi.org/10.13039/501100004963 320963 NEMESIS - Novel Energy Materials: Engineering Science and Integrated Systems The height and diameter of the nanostructure were extracted from the SE image. Measurements were taken on more than five nanostructures to obtain representative and accurate dimensions. An Inductively Coupled Plasma (ICP) (Oxford Instrument 100 Cobra) were used for the dry-etching process. en 1 10.15125/BATH-00154 https://doi.org/10.1016/j.mee.2016.03.058 pub open