<?xml version='1.0' encoding='utf-8'?>
<documents xmlns='http://eprints.org/ep2/data/2.0'>
  <document id='https://researchdata.bath.ac.uk/id/document/6465'>
    <docid>6465</docid>
    <rev_number>3</rev_number>
    <files>
      <file id='https://researchdata.bath.ac.uk/id/file/16245'>
        <fileid>16245</fileid>
        <datasetid>document</datasetid>
        <objectid>6465</objectid>
        <filename>Figure4_dashes_dimensions_double_exposure_linear_gratings.txt</filename>
        <mime_type>text/plain</mime_type>
        <hash>734a78763973fa030a082c6d8c60dd88</hash>
        <hash_type>MD5</hash_type>
        <filesize>899</filesize>
        <mtime>2017-05-16 12:13:40</mtime>
        <url>https://researchdata.bath.ac.uk/363/10/Figure4_dashes_dimensions_double_exposure_linear_gratings.txt</url>
      </file>
    </files>
    <eprintid>363</eprintid>
    <pos>10</pos>
    <placement>10</placement>
    <mime_type>text/plain</mime_type>
    <format>other</format>
    <formatdesc>Data of the dashes dimensions (width and length) obtained as a function of the exposure dose extracted from secondary electron images showed in Figure 4</formatdesc>
    <language>en</language>
    <security>public</security>
    <license>cc_by</license>
    <main>Figure4_dashes_dimensions_double_exposure_linear_gratings.txt</main>
    <content>data</content>
  </document>
</documents>
