6510 2 16325 document 6510 Fig6c_resistdevelopmentdoublegrating170mJ_30mJ.txt text/x-c 32b2609393e2295d9c30715d917e13c9 MD5 25270064 2017-05-18 11:36:07 https://researchdata.bath.ac.uk/363/51/Fig6c_resistdevelopmentdoublegrating170mJ_30mJ.txt 363 51 51 text/x-c other Modelling data of the resist patterns expected after development for a double exposure for doses of 170mJ.c-2 and 30 mJ.cm-2 (Fig6c) en public

Fig6c_resistdevelopmentdoublegrating170mJ_30mJ.txt

data