6511 2 16327 document 6511 Fig6d_resistdevelopmentdoublegrating170mJ_70mJ.txt text/x-c f2bebac2db172fdd9194282afc3a2fb9 MD5 17610551 2017-05-18 11:36:10 https://researchdata.bath.ac.uk/363/52/Fig6d_resistdevelopmentdoublegrating170mJ_70mJ.txt 363 52 52 text/x-c other Modelling data of the resist patterns expected after development for a double exposure for doses of 170mJ.c-2 and 70 mJ.cm-2 (Fig6c) en public cc_by

Fig6d_resistdevelopmentdoublegrating170mJ_70mJ.txt

data