<?xml version='1.0' encoding='utf-8'?>
<documents xmlns='http://eprints.org/ep2/data/2.0'>
  <document id='https://researchdata.bath.ac.uk/id/document/6519'>
    <docid>6519</docid>
    <rev_number>2</rev_number>
    <files>
      <file id='https://researchdata.bath.ac.uk/id/file/16344'>
        <fileid>16344</fileid>
        <datasetid>document</datasetid>
        <objectid>6519</objectid>
        <filename>Fig9c_10k_120mJ400nm_45mJ600nm.tif</filename>
        <mime_type>image/tiff</mime_type>
        <hash>1606f52a1b5b7671634998ba89229201</hash>
        <hash_type>MD5</hash_type>
        <filesize>1231850</filesize>
        <mtime>2017-05-18 11:39:07</mtime>
        <url>https://researchdata.bath.ac.uk/363/59/Fig9c_10k_120mJ400nm_45mJ600nm.tif</url>
      </file>
    </files>
    <eprintid>363</eprintid>
    <pos>59</pos>
    <placement>59</placement>
    <mime_type>image/tiff</mime_type>
    <format>other</format>
    <formatdesc>Raw Secondary electron image of holes in resist obtained after double exposure with a 800 nm period linear grating mask and a 1.2 micron period used in Figure 9c</formatdesc>
    <language>en</language>
    <security>public</security>
    <license>cc_by</license>
    <main>Fig9c_10k_120mJ400nm_45mJ600nm.tif</main>
    <content>data</content>
  </document>
</documents>
