6521 2 16348 document 6521 Figure10_holes_dimensions_double_exposure_linear_gratings.txt text/plain bbf2c3fb8e634967b9edfddec6187794 MD5 931 2017-05-18 11:39:20 https://researchdata.bath.ac.uk/363/61/Figure10_holes_dimensions_double_exposure_linear_gratings.txt 363 61 61 text/plain other Data of holes in resist dimensions (width and length) obtained as a function of the exposure dose extracted from secondary electron images showed in Figure 10 en public cc_by

Figure10_holes_dimensions_double_exposure_linear_gratings.txt

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