Dataset for "Displacement Talbot Lithography: an alternative technique to fabricate nanostructured metamaterials"

363 92 6455 2 16222 document 6455 Figure1a_30k_50mJ.bmp image/x-ms-bmp bcdb286d9903d7a2b28ea026805f4cb5 MD5 308278 2017-05-16 10:47:49 https://researchdata.bath.ac.uk/363/1/Figure1a_30k_50mJ.bmp 363 1 1 image/x-ms-bmp other Raw Secondary electron image of the 400 nm linear grating obtained for a 50mJ.cm-2 dose exposure used in Figure 1a en public cc_by

Figure1a_30k_50mJ.bmp

data 6456 3 16224 document 6456 Figure1b_30k_60mJ.bmp image/x-ms-bmp 2dc05b9289efae8c74871b949751d2e8 MD5 308278 2017-05-16 10:48:02 https://researchdata.bath.ac.uk/363/2/Figure1b_30k_60mJ.bmp 363 2 2 image/x-ms-bmp other Raw Secondary electron image of the 400 nm linear grating obtained for a 60 mJ.cm-2 dose exposure used in Figure 1b en public cc_by

Figure1b_30k_60mJ.bmp

data 6457 2 16226 document 6457 Figure1c_30k_70mJ.bmp image/x-ms-bmp 7e9ad87a259ec6dc6d089d3c8e69ac36 MD5 308278 2017-05-16 10:48:05 https://researchdata.bath.ac.uk/363/3/Figure1c_30k_70mJ.bmp 363 3 3 image/x-ms-bmp other Raw Secondary electron image of the 400 nm linear grating obtained for a 70 mJ.cm-2 dose exposure used in Figure 1c en public cc_by

Figure1c_30k_70mJ.bmp

data 6458 2 16228 document 6458 Figure1d_30k1_80mJ.bmp image/x-ms-bmp ad7a7ef977be40cdc07784431be34105 MD5 308278 2017-05-16 10:48:07 https://researchdata.bath.ac.uk/363/4/Figure1d_30k1_80mJ.bmp 363 4 4 image/x-ms-bmp other Raw Secondary electron image of the 400 nm linear grating obtained for a 80 mJ.cm-2 dose exposure used in Figure 1d en public cc_by

Figure1d_30k1_80mJ.bmp

data 6459 2 16231 document 6459 Figure2_resist_linewidth_function_of_exposure_data.txt text/plain 6ae50e83b4fff4c33f19ff3462b0ea12 MD5 565 2017-05-16 11:02:27 https://researchdata.bath.ac.uk/363/5/Figure2_resist_linewidth_function_of_exposure_data.txt 363 5 5 text/plain other Data of the resist linewidth size obtained as a function of the exposure dose extracted from secondary electron images en public cc_by

Figure2_resist_linewidth_function_of_exposure_data.txt

data 6460 2 16234 document 6460 Figure3a_25k_50mJ400nm_20mJ600nm.bmp image/x-ms-bmp 6aa526d5ccec81810be7764b3d1d567c MD5 4916278 2017-05-16 11:20:41 https://researchdata.bath.ac.uk/363/6/Figure3a_25k_50mJ400nm_20mJ600nm.bmp 363 6 6 image/x-ms-bmp other Raw Secondary electron image of the dashes obtained after double exposure with a 800 nm period linear grating mask and a 1.2 micron period obtained used in Figure 3a en public cc_by

Figure3a_25k_50mJ400nm_20mJ600nm.bmp

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figure3b_25k_50mJ400nm_22pt5mJ600nm.bmp

data 6462 2 16238 document 6462 Figure3c_25k_50mJ400nm_25mJ600nm.bmp image/x-ms-bmp bd479603c314a389d72b0f8402d3f673 MD5 4916278 2017-05-16 11:20:50 https://researchdata.bath.ac.uk/363/8/Figure3c_25k_50mJ400nm_25mJ600nm.bmp 363 8 8 image/x-ms-bmp other Raw Secondary electron image of the dashes obtained after double exposure with a 800 nm period linear grating mask and a 1.2 micron period obtained used in Figure 3c en public cc_by

Figure3c_25k_50mJ400nm_25mJ600nm.bmp

data 6463 3 16240 document 6463 Figure3d_25k_50mJ400nm_30mJ600nm.bmp image/x-ms-bmp db6bf66fad001f8792f98c57c68f8c0b MD5 4916278 2017-05-16 11:20:54 https://researchdata.bath.ac.uk/363/9/Figure3d_25k_50mJ400nm_30mJ600nm.bmp 363 9 9 image/x-ms-bmp other Raw Secondary electron image of the dashes obtained after double exposure with a 800 nm period linear grating mask and a 1.2 micron period obtained used in Figure 3d en public cc_by

Figure3d_25k_50mJ400nm_30mJ600nm.bmp

data 6465 3 16245 document 6465 Figure4_dashes_dimensions_double_exposure_linear_gratings.txt text/plain 734a78763973fa030a082c6d8c60dd88 MD5 899 2017-05-16 12:13:40 https://researchdata.bath.ac.uk/363/10/Figure4_dashes_dimensions_double_exposure_linear_gratings.txt 363 10 10 text/plain other Data of the dashes dimensions (width and length) obtained as a function of the exposure dose extracted from secondary electron images showed in Figure 4 en public cc_by

Figure4_dashes_dimensions_double_exposure_linear_gratings.txt

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indexcodes.txt

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indexcodes.txt

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Fig5a_NormalizedAerial_800nmgratingphasemask_integratedoveronetalbotlength.txt

data 6505 2 16315 document 6505 Fig5b_NormalizedAerial_1200nmgratingphasemask_integratedoveronetalbotlength.txt text/plain 5401bd13277a08f0737493b8e6ecb053 MD5 68445743 2017-05-18 11:35:03 https://researchdata.bath.ac.uk/363/46/Fig5b_NormalizedAerial_1200nmgratingphasemask_integratedoveronetalbotlength.txt 363 46 46 text/plain other Modelling data of the normalized intensity of the aerial image integrated over one Talbot length obtained for a 1200nm linear grating phase mask en public cc_by

Fig5b_NormalizedAerial_1200nmgratingphasemask_integratedoveronetalbotlength.txt

data 6506 2 16317 document 6506 Fig5c_Normalizedintensity_Aerial_crosssection_800nmgratingphasemask.txt text/plain 5fef8ab107acf77e2233eecba90baa74 MD5 42827 2017-05-18 11:35:11 https://researchdata.bath.ac.uk/363/47/Fig5c_Normalizedintensity_Aerial_crosssection_800nmgratingphasemask.txt 363 47 47 text/plain other Modelling data of the normalized intensity of the aerial image integrated over one Talbot length obtained for a 800nm linear grating phase mask along the x axis en public cc_by

Fig5c_Normalizedintensity_Aerial_crosssection_800nmgratingphasemask.txt

data 6507 2 16319 document 6507 Fig5d_Normalizedintensity_Aerial_crosssection_1200nmgratingphasemask.txt text/plain ec4bb4ee97e168a487be37789e493274 MD5 64117 2017-05-18 11:35:21 https://researchdata.bath.ac.uk/363/48/Fig5d_Normalizedintensity_Aerial_crosssection_1200nmgratingphasemask.txt 363 48 48 text/plain other Modelling data of the normalized intensity of the aerial image integrated over one Talbot length obtained for a 800nm linear grating phase mask along the y axis en public cc_by

Fig5d_Normalizedintensity_Aerial_crosssection_1200nmgratingphasemask.txt

data 6508 2 16321 document 6508 Fig6a_Aerialdoublegrating170mJ_30mJ.txt text/plain 69f199173c63f868b4b14380d852ee5c MD5 68485667 2017-05-18 11:35:41 https://researchdata.bath.ac.uk/363/49/Fig6a_Aerialdoublegrating170mJ_30mJ.txt 363 49 49 text/plain other Modelling data of the intensity of the aerial image integrated over one Talbot length obtained for a double exposure (Fig6a) Energy combination 170/30 mJ.cm-2 en public cc_by

Fig6a_Aerialdoublegrating170mJ_30mJ.txt

data 6509 2 16323 document 6509 Fig6b_Aerialdoublegrating170mJ_60mJ.txt text/plain b4128ce01a8a8be5fd451e50c7c93ff6 MD5 68482640 2017-05-18 11:36:01 https://researchdata.bath.ac.uk/363/50/Fig6b_Aerialdoublegrating170mJ_60mJ.txt 363 50 50 text/plain other Modelling data of the intensity of the aerial image integrated over one Talbot length obtained for a double exposure (Fig6b) Energy combination 170/70 mJ.cm-2 en public cc_by

Fig6b_Aerialdoublegrating170mJ_60mJ.txt

data 6510 2 16325 document 6510 Fig6c_resistdevelopmentdoublegrating170mJ_30mJ.txt text/x-c 32b2609393e2295d9c30715d917e13c9 MD5 25270064 2017-05-18 11:36:07 https://researchdata.bath.ac.uk/363/51/Fig6c_resistdevelopmentdoublegrating170mJ_30mJ.txt 363 51 51 text/x-c other Modelling data of the resist patterns expected after development for a double exposure for doses of 170mJ.c-2 and 30 mJ.cm-2 (Fig6c) en public

Fig6c_resistdevelopmentdoublegrating170mJ_30mJ.txt

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Fig6d_resistdevelopmentdoublegrating170mJ_70mJ.txt

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Fig7a_dashes_after_CHF3_etching.bmp

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Fig7b_150k_cross_section_lift-off_profile.bmp

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Fig8a_10k.tif

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Fig8b_10k.tif

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Fig9a_10kv_10k_120mJ400nm_35mJ600nm.tif

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fig9b_10k_120mJ400nm_40mJ600nm.tif

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Fig9c_10k_120mJ400nm_45mJ600nm.tif

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Fig9d_10k_120mJ400nm_50mJ600nm.tif

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Figure10_holes_dimensions_double_exposure_linear_gratings.txt

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indexcodes.txt

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http://eprints.org/relation/isVersionOf https://researchdata.bath.ac.uk/id/document/6512 http://eprints.org/relation/isVolatileVersionOf https://researchdata.bath.ac.uk/id/document/6512 http://eprints.org/relation/issmallThumbnailVersionOf https://researchdata.bath.ac.uk/id/document/6512 archive 3087 disk0/00/00/03/63 2017-06-26 11:01:43 2024-07-18 12:31:39 2017-06-26 11:01:43 data_collection show Le Boulbar Emmanuel elb43@bath.ac.uk 0000-0001-6364-3976 University of Bath TRUE ProjectLeader Shields Philip P.Shields@bath.ac.uk 0000-0003-0517-132X University of Bath Dataset for "Displacement Talbot Lithography: an alternative technique to fabricate nanostructured metamaterials" FV0010 GB0020 GE0030 HH0020 HH0030 dept_elec_eng This dataset contains scanning electron microscopy (SEM) secondary electron (SE) images of linear gratings resist, dashes and holes in resist that were obtained using Displacement Talbot lithography. These techniques were used to assess the dimensions of the resist features that were obtained with linear grating mask, using single or double exposure steps. SE images also shows the lift-off profile used in order to obtain metamaterial 'fishnet' like metallic structures. The dimensions of the measured linear gratings, dashes and holes are written in text files. 2017-05-15 University of Bath public RightsHolder University of Bath Engineering and Physical Sciences Research Council https://doi.org/10.13039/501100000266 EP/M015181/1 Manufacturing of Nano-Engineered III-Nitride Semiconductors Engineering and Physical Sciences Research Council https://doi.org/10.13039/501100000266 EP/M022862/1 Manufacturing of Nano-Engineered III-N Semiconductors - Equipment Displacement Talbot Lithography (Phable), commercialized by Eulitha, was used to fabricate linear gratings, dashes and holes in resist. Phase mask of 800 nm period and 1.2 micron period, with a filling factor of 62%, were used for this study. Secondary electron images were captured using a Hitachi S-4300 scanning electron microscope (SEM). An accelerating voltage of 5 kV was used to collect the images. Edwards e-beam evaporator were used to deposit titanium and gold. 2016-09-01 en 1 10.15125/BATH-00363 https://doi.org/10.1117/12.2265774 pub