6773 3 17495 document 6773 Fig1.a_SEM_10k_plan-view.tif image/tiff 28c160587cfc31073edfc260b310f225 MD5 194960 2017-08-18 09:01:40 https://researchdata.bath.ac.uk/414/1/Fig1.a_SEM_10k_plan-view.tif 414 1 1 image/tiff other SEM plan-view image of the resist mask after DTL exposure for a dose of 100 mJ/cm2 en public cc_by

Fig1.a_SEM_10k_plan-view.tif

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