Dataset for "Optical properties and resonant cavity modes in axial InGaN/GaN nanotube microcavities"

414 85 6773 3 17495 document 6773 Fig1.a_SEM_10k_plan-view.tif image/tiff 28c160587cfc31073edfc260b310f225 MD5 194960 2017-08-18 09:01:40 https://researchdata.bath.ac.uk/414/1/Fig1.a_SEM_10k_plan-view.tif 414 1 1 image/tiff other SEM plan-view image of the resist mask after DTL exposure for a dose of 100 mJ/cm2 en public cc_by

Fig1.a_SEM_10k_plan-view.tif

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Fig1.b_SEM_10k_plan-view.tif

data 6775 3 17501 document 6775 Fig1.c_SEM_10k_plan-view.tif image/tiff fcff17976f6432f5a92995c75b682a1c MD5 232060 2017-08-18 09:03:17 https://researchdata.bath.ac.uk/414/3/Fig1.c_SEM_10k_plan-view.tif 414 3 3 image/tiff other SEM plan-view image of the resist mask after DTL exposure for a dose of 480 mJ/cm2 en public cc_by

Fig1.c_SEM_10k_plan-view.tif

data 6780 3 17517 document 6780 Fig2.a_SEM_10k_cross-section.bmp image/x-ms-bmp 245d3ecf8dc3f0705add73b1bc30cde3 MD5 308278 2017-08-18 09:06:42 https://researchdata.bath.ac.uk/414/4/Fig2.a_SEM_10k_cross-section.bmp 414 4 4 image/x-ms-bmp other SEM low magnification cross-section image of the axial InGaN/GaN nanotube LED structures obtained after DTL patterning and ICP top-down etching en public cc_by

Fig2.a_SEM_10k_cross-section.bmp

data 6781 3 17519 document 6781 Fig2.b_SEM_30k_cross-section.bmp image/x-ms-bmp bb5546c9796b089b0dbadfc69af42867 MD5 308278 2017-08-18 09:06:45 https://researchdata.bath.ac.uk/414/5/Fig2.b_SEM_30k_cross-section.bmp 414 5 5 image/x-ms-bmp other SEM high magnification cross-section image of the axial InGaN/GaN nanotube LED structures obtained after DTL patterning and ICP top-down etching en public cc_by

Fig2.b_SEM_30k_cross-section.bmp

data 6782 3 17521 document 6782 Inset_Fig2.b_SEM_10k_plan-view.bmp image/x-ms-bmp 4912b99bfb82d26d6ffc064e6389fec2 MD5 308278 2017-08-18 09:06:48 https://researchdata.bath.ac.uk/414/6/Inset_Fig2.b_SEM_10k_plan-view.bmp 414 6 6 image/x-ms-bmp other SEM plan-view image of the axial InGaN/GaN nanotube LED structures obtained after DTL patterning and ICP top-down etching en public cc_by

Inset_Fig2.b_SEM_10k_plan-view.bmp

data 6783 3 17524 document 6783 Fig3.a_SEM_24k_tilt-view.tif image/tiff 868fa3650bbcb0b8f2fa2e9d2547081f MD5 976411 2017-08-18 09:07:44 https://researchdata.bath.ac.uk/414/7/Fig3.a_SEM_24k_tilt-view.tif 414 7 7 image/tiff other SEM tilt-view image of the axial InGaN/GaN nanotube LED structures obtained after DTL patterning and ICP top-down etching en public cc_by

Fig3.a_SEM_24k_tilt-view.tif

data 6785 3 17530 document 6785 Fig3.d_CL_spectra.xlsx application/vnd.openxmlformats-officedocument.spreadsheetml.sheet 1b8998263639ea37f8c91b0280cd530b MD5 77894 2017-08-18 09:13:13 https://researchdata.bath.ac.uk/414/9/Fig3.d_CL_spectra.xlsx 414 9 9 application/vnd.openxmlformats-officedocument.spreadsheetml.sheet other CL spectra extracted from the hyperspectral dataset at SQW positions for various InGaN/GaN nanotubes en public cc_by

Fig3.d_CL_spectra.xlsx

data 6786 3 17533 document 6786 Fig4.a_SEM_30k.bmp image/x-ms-bmp b0f6a0d9570c94db733399c83323c4ff MD5 308278 2017-08-18 09:14:36 https://researchdata.bath.ac.uk/414/10/Fig4.a_SEM_30k.bmp 414 10 10 image/x-ms-bmp other SEM images of a single dispersed InGaN/GaN nanotube en public cc_by

Fig4.a_SEM_30k.bmp

data 6787 3 17535 document 6787 Fig4.b_41kw_cm-2.png image/png 2ac370e68a953faa423b772029f55516 MD5 146999 2017-08-18 09:14:40 https://researchdata.bath.ac.uk/414/11/Fig4.b_41kw_cm-2.png 414 11 11 image/png other CCD images of a single InGaN/GaN nanotube pumped with µPL at 41 kW/cm2 en public cc_by

Fig4.b_41kw_cm-2.png

data 6788 3 17537 document 6788 Fig4.c_205kw_cm-2.png image/png 6ea32789071eabbe768d3696495bf780 MD5 151738 2017-08-18 09:14:44 https://researchdata.bath.ac.uk/414/12/Fig4.c_205kw_cm-2.png 414 12 12 image/png other CCD images of a single InGaN/GaN nanotube pumped with µPL at 205 kW/cm2 en public cc_by

Fig4.c_205kw_cm-2.png

data 6789 3 17539 document 6789 Fig4.d_410_kw_cm-2.png image/png 821836d5563e1449bb142bb75ad84c47 MD5 211515 2017-08-18 09:14:48 https://researchdata.bath.ac.uk/414/13/Fig4.d_410_kw_cm-2.png 414 13 13 image/png other CCD images of a single InGaN/GaN nanotube pumped with µPL at 410 kW/cm2 en public cc_by

Fig4.d_410_kw_cm-2.png

data 6790 3 17541 document 6790 Fig4.e_and_f_PL_power_dependent_measurments.xlsx application/vnd.openxmlformats-officedocument.spreadsheetml.sheet 145b80e79c4ce24a42282960dce544eb MD5 728535 2017-08-18 09:14:51 https://researchdata.bath.ac.uk/414/14/Fig4.e_and_f_PL_power_dependent_measurments.xlsx 414 14 14 application/vnd.openxmlformats-officedocument.spreadsheetml.sheet other InGaN/GaN nanotube spectra for a continuous CW 375 nm excitation at RT with (e) µPL and (f) confocal microscope technique. en public cc_by

Fig4.e_and_f_PL_power_dependent_measurments.xlsx

data 6791 4 17544 document 6791 Fig5.a_FDTD_spectra.xlsx application/vnd.openxmlformats-officedocument.spreadsheetml.sheet 34bab29e16b0a96aa60816910d87816d MD5 1985788 2017-08-18 09:16:29 https://researchdata.bath.ac.uk/414/15/Fig5.a_FDTD_spectra.xlsx 414 15 15 application/vnd.openxmlformats-officedocument.spreadsheetml.sheet other Normalized E-field intensity spectra of a 2.4 µm tall InGaN/GaN nanotube with a circular and non-circular shape en public cc_by

Fig5.a_FDTD_spectra.xlsx

data 6792 3 17547 document 6792 Fig7_Comparison_CL_PL_techniques_with_FDTD.xlsx application/vnd.openxmlformats-officedocument.spreadsheetml.sheet a576ef215ea03e3409ec9080f0669fc5 MD5 226491 2017-08-18 09:17:11 https://researchdata.bath.ac.uk/414/16/Fig7_Comparison_CL_PL_techniques_with_FDTD.xlsx 414 16 16 application/vnd.openxmlformats-officedocument.spreadsheetml.sheet other Comparison between the normalized simulated field intensity spectra and the normalized spectra for the employed CL/PL techniques. en public cc_by

Fig7_Comparison_CL_PL_techniques_with_FDTD.xlsx

data 6793 3 17550 document 6793 Fig8.a_FDTD_spectra_height_variation.xlsx application/vnd.openxmlformats-officedocument.spreadsheetml.sheet 9b1889df545a8216928a068c9fbbc89b MD5 2100317 2017-08-18 09:18:22 https://researchdata.bath.ac.uk/414/17/Fig8.a_FDTD_spectra_height_variation.xlsx 414 17 17 application/vnd.openxmlformats-officedocument.spreadsheetml.sheet other E-field intensity spectra of a 2.4 µm, 1.6 and 700 nm tall InGaN/GaN nanotube with a SQW 600nm bellow en public cc_by

Fig8.a_FDTD_spectra_height_variation.xlsx

data 6794 4 17553 document 6794 Fig8.b_FDTD_spectra_SQW_position_variation.xlsx application/vnd.openxmlformats-officedocument.spreadsheetml.sheet b166293c56b09eb2774737216866f62f MD5 2837419 2017-08-18 09:18:56 https://researchdata.bath.ac.uk/414/18/Fig8.b_FDTD_spectra_SQW_position_variation.xlsx 414 18 18 application/vnd.openxmlformats-officedocument.spreadsheetml.sheet other E-field intensity spectra of a 2.4 µm tall InGaN/GaN nanotube with a SQW changing from the center of the nanotube at 1220 nm to the actual experimental position of the SQW at 1820 nm. en public cc_by

Fig8.b_FDTD_spectra_SQW_position_variation.xlsx

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http://eprints.org/relation/isVersionOf https://researchdata.bath.ac.uk/id/document/7509 http://eprints.org/relation/isVolatileVersionOf https://researchdata.bath.ac.uk/id/document/7509 http://eprints.org/relation/isIndexCodesVersionOf https://researchdata.bath.ac.uk/id/document/7509 archive 5419 disk0/00/00/04/14 2017-10-31 11:13:27 2024-07-18 12:31:40 2017-10-31 11:13:27 data_collection show Coulon Pierre-Marie P.Coulon@bath.ac.uk 0000-0002-9120-7554 University of Bath TRUE Pugh Jon 0000-0001-7156-3757 University of Bristol FALSE Athanasiou Modestos 0000-0003-1684-9482 University of Sheffield FALSE Kusch Gunnar gunnar.kusch@strath.ac.uk 0000-0003-2743-1022 University of Strathclyde FALSE Le Boulbar Emmanuel elb43@bath.ac.uk 0000-0001-6364-3976 University of Bath FALSE Other Pugh Jon 0000-0001-7156-3757 University of Bristol Other Athanasiou Modestos 0000-0003-1684-9482 University of Sheffield Other Kusch Gunnar gunnar.kusch@strath.ac.uk 0000-0003-2743-1022 University of Strathclyde Other Le Boulbar Emmanuel elb43@bath.ac.uk 0000-0001-6364-3976 University of Bath Other Sarua Andrei 0000-0001-5617-4227 University of Bristol Other Smith Rick 0000-0002-7718-7796 University of Sheffield Other Martin Robert r.w.martin@strath.ac.uk 0000-0002-6119-764X University of Strathclyde Other Wang Tao 0000-0001-5976-4994 University of Sheffield Other Cryan Martin 0000-0002-8460-7912 University of Bristol Other Allsopp Duncan D.Allsopp@bath.ac.uk 0000-0003-4197-9852 University of Bath ProjectLeader Shields Philip P.Shields@bath.ac.uk 0000-0003-0517-132X University of Bath Dataset for "Optical properties and resonant cavity modes in axial InGaN/GaN nanotube microcavities" EA0040 dept_elec_eng This dataset contains scanning electron microscopy (SEM) images, Catodoluminescence (CL), MicroPL and Confocal PL measurements and Finite-Difference Time-Domain (FDTD) simulations carried out on InGaN/GaN nanotube microcavities. The samples were fabricated via a combination of Displacement Talbot Lithography for patterning and inductively coupled plasma top-down dry-etching. SEM imaging were used to assess first, the patterning of SiNx mask, and second, the InGaN/GaN nanotube morphology and dimensions. CL were used to assess the optical properties of individual InGaN/GaN nanotube. MicroPL and Confocal PL were used to carry out continuous excitation at room temperature of isolated InGaN/GaN nanotube. FDTD simulations were used to investigate the nature of the resonant modes. Correlation between PL techniques and FDTD simulation suggests that both mixed whispering gallery – Fabry-Perot cavity modes are observed within the single nanotube. 2017 University of Bath public RightsHolder University of Bath Engineering and Physical Sciences Research Council https://doi.org/10.13039/501100000266 EP/M015181/1 Manufacturing of Nano-Engineered III-Nitride Semiconductors Secondary electron images were captured using a Hitachi S-4300 scanning electron microscope (SEM). An accelerating voltage of 5 kV was used to collect the images. Cathodoluminescence hyperspectral imaging measurements were carried out at room temperature in a modified FEI Quanta 250 field emission SEM using electron energies of 5.0 keV and beam currents of approximately 1 nA. Light was collected using an NA 0.28 reflecting objective with its axis perpendicular to the electron beam and focused directly on the entrance of the spectrograph using an off-axis paraboloidal mirror. We used a 125 mm focal length spectrograph with a 600 lines/mm grating and 50 μm entrance slit, coupled to a cooled electron multiplying charge-coupled device (EMCCD) detector. µPL characterization was carried out on single nanotube cavities in an in-house made micro-PL system. A 375 nm continuous wave (CW) laser diode was used to selectively excite the InGaN/GaN SQW. A 50x magnification, 0.43 NA objective was used to focus the excitation laser down to ~ 2μm and collect the emission through a 1 mm fibre bundle. A 0.55 m Jobin Yvon spectrometer (iHR550) was used to disperse the emission and the emission was detected with an air-cooled charge coupled device (CCD). The system was equipped with X-Y-Z motorized stages allowing to selectively excite single nanotubes. All the measurements were performed at room temperature. Confocal PL characterization was performed using a commercial WITec confocal microscope. A 375 nm continuous wave (CW) diode laser was used as an optical pumping source and the system was equipped with a 300 mm Princeton instruments monochromator (SP2300i) and an air-cooled charge coupled device (CCD). An objective lens (100×, NA=0.95) was used to focus the laser beam down to a spot with a diameter of ~400 nm. The emission was dispersed by the monochromator with a resolution of ~0.1 nm. An optical fiber with a diameter of 10 µm acted as a pinhole, thus allowing the emission to be collected from only where the sample was excited. The system was equipped with a high-resolution x-y-z piezo-stage to individually address and examine single nanotubes. The spatial resolution of the system was ~ 160 nm. All the measurements were performed at room temperature. A three-dimensional finite difference time domain (FDTD) approach has been used to simulate the nanotube structure using commercial-grade software [Lumerical Solutions, Inc. http://www.lumerical.com/tcad-products/fdtd/]. A dipole source with emission wavelengths from 370 to 720 nm was vertically positioned in the plane of the nanotube quantum wells and centred within the width of the walls. All the geometrical data used for the simulation are from the SEM measurement of our nanotube. The n-GaN, p-GaN and GaN-substrate layers are given a refractive index defined by ellipsometry measurements performed on the as-grown structure at the University of Strathclyde. The InGaN quantum well layer is 3nm thick (n=2.6). There is a minimum of fifteen mesh cells per wavelength in the simulation that is run for 2000fs. Frequency-domain power monitors have been used to record the emission profile over the simulation region, which is surrounded by perfectly matched layer absorbing boundaries on all sides. The simulated spectra are collected by a grid of 12 time-monitors placed at various points inside the nanotube structure, accurately calculating the envelope of the time-domain field signal. For the perfectly-circular higher-Q examples, each resonant peak is isolated in the frequency domain using a Gaussian filter, and by taking the inverse Fourier transforms the time decay have been calculated separately for each peak. The slope of the time decay is used to calculate the Q-factor of each resonance. In the DTL fabricated structures, the electromagnetic fields decay completely from the simulation in a time that can be simulated reasonably by FDTD. Therefore, the resonant frequencies are found from the time-monitors along with the full-width half-maximum (FWHM) of the corresponding peaks. We can then use Q=fR/Δf where fR is the resonant frequency and Δf is the FWHM. The nanotube investigated by µPL and Confocal PL were mechanically removed from the substrate in an ultrasonic bath and then dispersed on a host sapphire substrate en 1 10.15125/BATH-00414 https://doi.org/10.1364/OE.25.028246 pub open All items available for download under a Creative Commons Attribution (CC-BY) licence.