Dataset for "Deep-UV Emission From Highly-Ordered AlGaN/AlN Core-Shell Nanorods"

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http://eprints.org/relation/isVersionOf https://researchdata.bath.ac.uk/id/document/9500 http://eprints.org/relation/isVolatileVersionOf https://researchdata.bath.ac.uk/id/document/9500 http://eprints.org/relation/issmallThumbnailVersionOf https://researchdata.bath.ac.uk/id/document/9500 archive 5419 disk0/00/00/05/42 2018-09-21 08:15:09 2024-07-18 12:31:46 2018-09-21 08:15:09 data_collection show Coulon Pierre-Marie P.Coulon@bath.ac.uk 0000-0002-9120-7554 University of Bath TRUE DataCollector Kusch Gunnar gunnar.kusch@strath.ac.uk 0000-0003-2743-1022 University of Strathclyde ProjectMember Martin Robert W. r.w.martin@strath.ac.uk 0000-0002-6119-764X University of Strathclyde ProjectLeader Shields Philip P.Shields@bath.ac.uk 0000-0003-0517-132X University of Bath Dataset for "Deep-UV Emission From Highly-Ordered AlGaN/AlN Core-Shell Nanorods" GE0030 GE0040 HH0050 dept_elec_eng This dataset contains scanning electron microscopy (SEM) images, transmission electron microscopy (TEM) pictures and Catodoluminescence (CL) measurements carried out on AlN and AlGaN/AlN core-shell nanorod. The samples were fabricated via a hybrid top-down/bottom up approach. Displacement Talbot Lithography is used to fabricate Au/Ni metal dots to act as a hard etch mask. Ultrathin AlN nanorod arrays are created; thanks to a two-step dry-wet etching process with first, chlorine-based dry etching of an AlN template and second, KOH-based wet etching. AlN facet recovery and AlGaN quantum well growth is performed by Metal Organic Vapor Phase Epitaxy. TEM and CL were used to assess the structural, chemical and optical quality of the various nanorod samples. 2018-09-06 University of Bath public RightsHolder University of Bath Engineering and Physical Sciences Research Council https://doi.org/10.13039/501100000266 EP/M015181/1 Manufacturing of Nano-Engineered III-Nitride Semiconductors Secondary electron images were captured using a Hitachi S-4300 scanning electron microscope (SEM). An accelerating voltage of 5 kV was used to collect the images. Transmission electron microscopy (TEM) images were captured using a JEOL 2100 with an accelerating voltage of 5kV. All acquisition has been performed along the [10-10] zone axis. Cathodoluminescence hyperspectral imaging measurements were carried out at room temperature in a modified FEI Quanta 250 field emission SEM using electron energies of 15.0 keV and beam currents of approximately 7 nA. Light was collected using an NA 0.28 reflecting objective with its axis perpendicular to the electron beam and focused directly on the entrance of the spectrograph using an off-axis paraboloidal mirror. We used a 125 mm focal length spectrograph with a 600 lines/mm grating and 50 μm entrance slit, coupled to a cooled electron multiplying charge-coupled device (EMCCD) detector. The nanorod investigated by TEM were mechanically removed from the substrate in an ultrasonic bath and then dispersed on a carbon grid. en 1 10.15125/BATH-00542 https://doi.org/10.1021/acsami.8b10605 pub Photo Lithography System f8bc2ccc-1682-454f-9467-28624e03d4c9