10044 4 29087 document 10044 Fig3_analysis_1um.xlsx application/vnd.openxmlformats-officedocument.spreadsheetml.sheet ab71eb7799a56ccd375b7d85081462b6 MD5 28438 2018-11-23 11:38:44 https://researchdata.bath.ac.uk/570/4/Fig3_analysis_1um.xlsx 570 4 4 application/vnd.openxmlformats-officedocument.spreadsheetml.sheet other Figure 3: Statistical analysis of the SEM pictures for the 1 µm pitch hexagonal mask. en public cc_by

Fig3_analysis_1um.xlsx

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