Dataset for "AlN overgrowth of nano-pillar-patterned sapphire with different offcut angle by metalorganic vapor phase epitaxy"

703 29 11893 2 34535 document 11893 Fig1b.tif image/tiff fb265ce7f6d8570c540c42e2a4c19357 MD5 224742 2019-09-18 08:43:49 https://researchdata.bath.ac.uk/703/1/Fig1b.tif 703 1 1 image/tiff other en public cc_by

Fig1b.tif

data 11894 2 34537 document 11894 Fig1c.tif image/tiff 1b660a27b3e7bf978f6e960e9556f13f MD5 175896 2019-09-18 08:44:12 https://researchdata.bath.ac.uk/703/2/Fig1c.tif 703 2 2 image/tiff other en public cc_by

Fig1c.tif

data 11895 2 34539 document 11895 Fig1c_inset.tif image/tiff f849ab55418d61221f9edf9e575f053e MD5 429606 2019-09-18 08:44:20 https://researchdata.bath.ac.uk/703/3/Fig1c_inset.tif 703 3 3 image/tiff other en public cc_by

Fig1c_inset.tif

data 11896 2 34541 document 11896 lightbox.jpg image/png 148751a8c819b1a207ef8efbd396bfe3 MD5 25389 2019-09-18 09:44:40 https://researchdata.bath.ac.uk/703/4/lightbox.jpg 703 4 4 image/png other Thumbnails conversion from other to thumbnail_lightbox en public

lightbox.jpg

http://eprints.org/relation/isVersionOf https://researchdata.bath.ac.uk/id/document/11895 http://eprints.org/relation/isVolatileVersionOf https://researchdata.bath.ac.uk/id/document/11895 http://eprints.org/relation/islightboxThumbnailVersionOf https://researchdata.bath.ac.uk/id/document/11895 11897 2 34542 document 11897 preview.jpg image/png f6b4ffb7e39f59e6fa26fd9e64a307db MD5 10456 2019-09-18 09:44:40 https://researchdata.bath.ac.uk/703/5/preview.jpg 703 5 5 image/png other Thumbnails conversion from other to thumbnail_preview en public

preview.jpg

http://eprints.org/relation/isVersionOf https://researchdata.bath.ac.uk/id/document/11895 http://eprints.org/relation/isVolatileVersionOf https://researchdata.bath.ac.uk/id/document/11895 http://eprints.org/relation/ispreviewThumbnailVersionOf https://researchdata.bath.ac.uk/id/document/11895 11898 2 34543 document 11898 medium.jpg image/png 3d3a7ab3666ca4521aa5516d727d52b4 MD5 3826 2019-09-18 09:44:41 https://researchdata.bath.ac.uk/703/6/medium.jpg 703 6 6 image/png other Thumbnails conversion from other to thumbnail_medium en public

medium.jpg

http://eprints.org/relation/isVersionOf https://researchdata.bath.ac.uk/id/document/11895 http://eprints.org/relation/isVolatileVersionOf https://researchdata.bath.ac.uk/id/document/11895 http://eprints.org/relation/ismediumThumbnailVersionOf https://researchdata.bath.ac.uk/id/document/11895 11899 2 34544 document 11899 small.jpg image/png 11d1b0f66d86455c393004a814810103 MD5 1159 2019-09-18 09:44:41 https://researchdata.bath.ac.uk/703/7/small.jpg 703 7 7 image/png other Thumbnails conversion from other to thumbnail_small en public

small.jpg

http://eprints.org/relation/isVersionOf https://researchdata.bath.ac.uk/id/document/11895 http://eprints.org/relation/isVolatileVersionOf https://researchdata.bath.ac.uk/id/document/11895 http://eprints.org/relation/issmallThumbnailVersionOf https://researchdata.bath.ac.uk/id/document/11895 11900 2 34545 document 11900 lightbox.jpg image/png 07094625b6b7fca126721362f5f5cf69 MD5 35681 2019-09-18 09:44:42 https://researchdata.bath.ac.uk/703/8/lightbox.jpg 703 8 8 image/png other Thumbnails conversion from other to thumbnail_lightbox en public

lightbox.jpg

http://eprints.org/relation/isVersionOf https://researchdata.bath.ac.uk/id/document/11894 http://eprints.org/relation/isVolatileVersionOf https://researchdata.bath.ac.uk/id/document/11894 http://eprints.org/relation/islightboxThumbnailVersionOf https://researchdata.bath.ac.uk/id/document/11894 11901 2 34546 document 11901 preview.jpg image/png fb9b4dd41614a2b61eb654b0d9f72cb0 MD5 13356 2019-09-18 09:44:42 https://researchdata.bath.ac.uk/703/9/preview.jpg 703 9 9 image/png other Thumbnails conversion from other to thumbnail_preview en public

preview.jpg

http://eprints.org/relation/isVersionOf https://researchdata.bath.ac.uk/id/document/11894 http://eprints.org/relation/isVolatileVersionOf https://researchdata.bath.ac.uk/id/document/11894 http://eprints.org/relation/ispreviewThumbnailVersionOf https://researchdata.bath.ac.uk/id/document/11894 11902 2 34547 document 11902 medium.jpg image/png 5f9a288954044ccbb1d28641af0491de MD5 3813 2019-09-18 09:44:42 https://researchdata.bath.ac.uk/703/10/medium.jpg 703 10 10 image/png other Thumbnails conversion from other to thumbnail_medium en public

medium.jpg

http://eprints.org/relation/isVersionOf https://researchdata.bath.ac.uk/id/document/11894 http://eprints.org/relation/isVolatileVersionOf https://researchdata.bath.ac.uk/id/document/11894 http://eprints.org/relation/ismediumThumbnailVersionOf https://researchdata.bath.ac.uk/id/document/11894 11903 2 34548 document 11903 small.jpg image/png cde0cdedb93613a6f84e37f8fae01df3 MD5 993 2019-09-18 09:44:42 https://researchdata.bath.ac.uk/703/11/small.jpg 703 11 11 image/png other Thumbnails conversion from other to thumbnail_small en public

small.jpg

http://eprints.org/relation/isVersionOf https://researchdata.bath.ac.uk/id/document/11894 http://eprints.org/relation/isVolatileVersionOf https://researchdata.bath.ac.uk/id/document/11894 http://eprints.org/relation/issmallThumbnailVersionOf https://researchdata.bath.ac.uk/id/document/11894 11904 2 34549 document 11904 lightbox.jpg image/png 0fc0d907cb35a98255de6288a9c00435 MD5 67680 2019-09-18 09:54:15 https://researchdata.bath.ac.uk/703/12/lightbox.jpg 703 12 12 image/png other Thumbnails conversion from other to thumbnail_lightbox en public

lightbox.jpg

preview.jpg

medium.jpg

small.jpg

http://eprints.org/relation/isVersionOf https://researchdata.bath.ac.uk/id/document/11893 http://eprints.org/relation/isVolatileVersionOf https://researchdata.bath.ac.uk/id/document/11893 http://eprints.org/relation/issmallThumbnailVersionOf https://researchdata.bath.ac.uk/id/document/11893 archive 5419 disk0/00/00/07/03 2019-11-18 11:00:06 2024-07-18 12:31:53 2019-11-18 11:00:06 data_collection show Coulon Pierre-Marie P.Coulon@bath.ac.uk 0000-0002-9120-7554 University of Bath TRUE ProjectLeader Shields Philip P.Shields@bath.ac.uk 0000-0003-0517-132X University of Bath Dataset for "AlN overgrowth of nano-pillar-patterned sapphire with different offcut angle by metalorganic vapor phase epitaxy" EA0040 GE0040 dept_elec_eng This dataset contains scanning electron microscopy (SEM) images of nano-pillar-patterned sapphire created via Displacement Talbot Lithography and Inductively coupled plasma dry etching. 2019-11-13 University of Bath public RightsHolder University of Bath Engineering and Physical Sciences Research Council https://doi.org/10.13039/501100000266 EP/M015181/1 Manufacturing of Nano-Engineered III-Nitride Semiconductors cent_nan Secondary electron images were captured using a Hitachi S-4300 scanning electron microscope (SEM). An accelerating voltage of 5 kV was used to collect the images DTL patternings have been performed on 2-inch sapphire wafers. A stack of two layers was spin-coated at 3000 rpm to obtain a ~ 270 nm bottom antireflective coating (BARC) (Wide 30W – Brewer Science) layer thickness, followed by either a layer of high-contrast positive resist (Dow® Ultra-i 123 diluted with Dow® EC11 solvent). A bake at 150°C of the BARC enables a wet-developable process and thus to create an undercut profile. DTL (PhableR 100, Eulitha) was then used to expose the resist with a coherent 375 nm light source with an energy density of 1 mW.cm-2 (Fig. 1a). A 1 μm pitch with 550 nm opening mask was employed which result in a Talbot length of 3.80 μm. A Gaussian velocity integration was applied and 8 Talbot lengths travel distance has been chosen to assure a homogeneous integration on several Talbot motifs. After a certain exposure time (which defines the exposure dose), the sample was baked for 1 min 30 sec at 120°C on a hot plate. The wafer was developed in MF-CD-26 for 180 to 240 sec (depending on the dose employed). The undercut profile created in the BARC after exposure and development was employed as a lift-off layer. 200 nm Ni layers were deposited via e-beam evaporation to produce metal masks in the circular opening at the surface of the wafer. Subsequent lift-off was achieved by soaking the wafer in MF-CD-26 developer. The wafers were cleaned in a 2 min reactive-ion etching (RIE) oxygen plasma to remove any BARC residue. Then, an ICP dry etch system was used to create nano-pillars in sapphire substrates. The experiments were performed with a Cl2/BCl3/Ar chemistry of 5/50/5 sccm, a temperature of 5°C, a pressure of 8 mTorr, 100 W RF power and 600 W ICP source power. Finally, the masks were etched away in aqua-regia solution (HCl:HNO3, 3:1). en 1 10.15125/BATH-00703 https://doi.org/10.1016/j.jcrysgro.2019.125343 pub HITACHI S4300 5831e6ba-41b4-4884-a7a3-6ed0c6e9ca19 Oxford Plasma Pro System 100 Cobra ICP 26b08c5d-2654-4b83-955c-de697ef59cc8 Edwards FL-400 electron beam evaporator 6635d5cd-4212-40c2-93aa-b2e8073137f4 open