11928 3 34729 document 11928 Figure 1.zip application/zip 0f216b527bb5f9e241030a9781f5d6a8 MD5 244409366 2019-09-25 13:41:54 https://researchdata.bath.ac.uk/709/1/Figure%201.zip 709 1 1 application/zip other Data of Fig. 1: Dual DTL exposures with single lateral displacement: - Matlab and csv files of the modelling data. - SEM pictures of the photoresist after Dual DTL exposure with a 1.5 µm hexagonal period amplitude mask. - SEM pictures after the e-beam deposition and lift-off process for a Dual DTL with a 1 µm hexagonal period amplitude mask. en public cc_by

Figure 1.zip

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