11929 2 34731 document 11929 Figure 2.zip application/zip 15cdda9d9364be3e2d53d9b949bd78f5 MD5 589613508 2019-09-25 13:46:32 https://researchdata.bath.ac.uk/709/2/Figure%202.zip 709 2 2 application/zip other Data of Fig. 2: Reduction in pitch to below the incident exposure wavelength: - Matlab and csv files of the modelling data. - SEM pictures of the photoresist after a 3 points and 4 points reduction of pitch process. en public cc_by

Figure 2.zip

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