Position No.	1	2	3	4	5	6	7	Average	SD	SE
Roughness average (Ra) (nm)	5	7.7	10.3	7.1	9.2	7.9	3.1	7.185714286	2.449781331	0.92593031
Root mean square roughness (Rq) (nm)	7	9.8	13.2	9.1	11.3	9.6	4.1	9.157142857	2.937605115	1.110310369
Maximum height of the roughness (Rt) (nm)	48	59.9	76.3	59.7	63.6	55.4	26.5	55.62857143	15.45096699	5.839916596
Maximum roughness valley depth (Rv) (nm)	20	33.8	39	25	30.9	32.1	10.5	27.32857143	9.625956972	3.638269754
Maximum roughness peak height (Rp) (nm)	28	26.2	37.3	34.7	32.7	23.3	16	28.31428571	7.326988597	2.769341384
Average maximum height of the roughness (Rtm) (nm)	35	41.1	53.6	40.3	50.1	41.8	19.5	40.2	11.07910947	4.187509773
Average maximum roughness valley depth (Rvm) (nm)	17	22.5	29.1	18.9	26.7	23.1	9.2	20.92857143	6.637950056	2.508909295
Average maximum roughness peak height (Rpm) (nm)	19	18.6	24.6	21.4	23.3	18.7	10.3	19.41428571	4.660982933	1.761685958
Average third highest peak to third lowest valley height (R3z) (nm)	36	45.8	56.5	43.6	57.3	44.1	22.1	43.62857143	12.10505601	4.575281115
Average third highest peak to third lowest valley height (R3z ISO) (nm)	21	29.5	35.8	24.7	34.8	27.4	10.5	26.24285714	8.700738885	3.288570187
Average maximum height of the profile (Rz) (nm)	42	41.5	54.2	51.8	56.4	40.9	24.2	44.42857143	11.02462611	4.166916999
Average maximum height of the roughness (Rz ISO) (nm)	35	41.1	53.6	40.3	50.1	41.8	19.5	40.2	11.07910947	4.187509773
Skewness (Rsk)	0.129	-0.383	-0.313	0.241	0.015	-0.243	0.369	-0.026428571	0.291526361	0.110186607
Kurtosis (Rku)	3.508	3.397	3.097	3.252	2.739	2.861	4.016	3.267142857	0.429869526	0.162475409
Waviness average (Wa) (nm)	88	19.2	22.4	127.2	22.1	70.2	16.7	52.25714286	43.53909573	16.45623137
Root mean square waviness (Wq) (nm)	116	25.2	26.9	155.3	27.7	85.7	20.2	65.28571429	54.18638908	20.48052999
Waviness maximum height (Wy=Wmax) (nm)	1102	230.9	325.1	1649.9	957.2	1908	1263.8	1062.414286	625.6192011	236.4618316
Maximum height of the profile (Pt) (nm)	1102	233.4	328	1669.4	972.2	1922.7	1271.4	1071.3	630.8697938	238.4463691
										
Profile taken from top right to bottom left										
