Position No.		1	2	3	4	5	Average	SD	SE
Roughness average (Ra) (nm)		4.5	4.5	4	2.5	3.4	3.78	0.846758525	0.378681925
Root mean square roughness (Rq) (nm)		5.8	5.9	5.2	3.3	4.4	4.92	1.084896308	0.485180379
Maximum height of the roughness (Rt) (nm)		36.5	46.9	36	19.1	27.5	33.2	10.4608795	4.678247535
Maximum roughness valley depth (Rv) (nm)		18	26.6	20.6	8.9	14.7	17.76	6.597954228	2.950694833
Maximum roughness peak height (Rp) (nm)		18.4	20.3	15.4	10.2	12.8	15.42	4.086808045	1.82767612
Average maximum height of the roughness (Rtm) (nm)		28	27.9	22.9	15.7	20.8	23.06	5.175229464	2.314432976
Average maximum roughness valley depth (Rvm) (nm)		13.8	14.4	11.6	7.9	9.7	11.48	2.734410357	1.222865487
Average maximum roughness peak height (Rpm) (nm)		14.3	13.6	11.3	7.8	11.1	11.62	2.552841554	1.14166545
Average third highest peak to third lowest valley height (R3z) (nm)		30.8	30.8	23.8	17.7	22.7	25.16	5.638528177	2.521626459
Average third highest peak to third lowest valley height (R3z ISO) (nm)		18.2	17	15.4	11.1	14.9	15.32	2.697591518	1.206399602
Average maximum height of the profile (Rz) (nm)		30.3	31.9	25.2	18.8	23.7	25.98	5.269440198	2.356565297
Average maximum height of the roughness (Rz ISO) (nm)		28	27.9	22.9	15.7	20.8	23.06	5.175229464	2.314432976
Skewness (Rsk)		0.034	-0.133	-0.132	0.081	0.116	-0.0068	0.118379475	0.05294091
Kurtosis (Rku)		3.345	4.453	4.094	3.459	3.432	3.7566	0.49044806	0.219335041
Waviness average (Wa) (nm)		58.7	25.8	22.5	116.8	113.2	67.4	45.7172287	20.44536622
Root mean square waviness (Wq) (nm)		68.9	30.6	28.4	138.8	128.6	79.06	52.5383479	23.49586347
Waviness maximum height (Wy=Wmax) (nm)		2128.3	418.6	352.9	2029.9	3336	1653.14	1266.338814	566.3239343
Maximum height of the profile (Pt) (nm)		2133.6	425.4	356.1	2034.8	3346.2	1659.22	1268.11196	567.1169089
									
Profile taken from top right to bottom left									
