Position No.		1	2	3	4	5	6	7	8	9	Average	SD	SE
Roughness average (Ra) (nm)		2.7	2.1	2.2	1.6	2.5	2.2	2.3	3	2.1	2.3	0.4	0.133333333
Root mean square roughness (Rq) (nm)		3.4	2.7	2.8	1.9	3.2	2.8	2.9	4	2.6	2.922222222	0.580469159	0.19348972
Maximum height of the roughness (Rt) (nm)		21.6	17.2	15.5	10.1	22.8	18.6	17.7	32	13.9	18.82222222	6.249755551	2.08325185
Maximum roughness valley depth (Rv) (nm)		12.8	8.1	8.2	4.6	13.7	7.7	8.1	19	6.7	9.877777778	4.446846573	1.482282191
Maximum roughness peak height (Rp) (nm)		8.8	9.1	7.3	5.4	9.1	10.9	9.7	13	7.1	8.933333333	2.224297642	0.741432547
Average maximum height of the roughness (Rtm) (nm)		16.2	13.4	13.2	8.9	16.4	13.5	13.8	20	11.8	14.13333333	3.134086789	1.044695596
Average maximum roughness valley depth (Rvm) (nm)		8.9	6.3	6.8	4	8.8	6.3	6.3	11	5.7	7.122222222	2.089125282	0.696375094
Average maximum roughness peak height (Rpm) (nm)		7.3	7.1	6.4	4.9	7.5	7.2	7.6	9	6	7	1.146734494	0.382244831
Average third highest peak to third lowest valley height (R3z) (nm)		15.7	13.3	13.7	9.5	18.2	14.1	14.9	23	12.8	15.02222222	3.794989387	1.264996462
Average third highest peak to third lowest valley height (R3z ISO) (nm)		10.4	7.8	9.1	6.1	10	8.8	9.8	12	9.2	9.244444444	1.658396146	0.552798715
Average maximum height of the profile (Rz) (nm)		16.3	14.4	13.1	10	16.7	15.6	17.5	24	13.1	15.63333333	3.891657744	1.297219248
Average maximum height of the roughness (Rz ISO) (nm)		16.2	13.4	13.2	8.9	16.4	13.5	13.8	20	11.8	14.13333333	3.134086789	1.044695596
Skewness (Rsk)		-0.151	-0.019	-0.112	0.218	-0.193	0.23	0.359	0.003	0.069	0.044888889	0.190031211	0.063343737
Kurtosis (Rku)		3.217	2.954	2.769	2.684	3.496	3.117	3.247	4.705	2.639	3.203111111	0.631386855	0.210462285
Waviness average (Wa) (nm)		31.4	57.2	31.5	10.3	28.3	34	114.4	349	20.6	75.18888889	107.0895822	35.69652739
Root mean square waviness (Wq) (nm)		37.4	71.2	40.4	12.4	37.5	38.5	133.4	400	22.6	88.15555556	122.2222986	40.7407662
Waviness maximum height (Wy=Wmax) (nm)		849.5	1419.5	1046	879.8	644.4	458.5	2289.2	1162.1	80	981	629.1196428	209.7065476
Maximum height of the profile (Pt) (nm)		851.2	1428.6	1048.4	882.1	647.5	462.5	2295.1	1163.1	84.8	984.8111111	629.9449588	209.9816529
													
Profile taken from top right to bottom left													
