Dataset for 'Design and fabrication of enhanced lateral growth for dislocation reduction and strain management in GaN using nanodashes'

Dataset for 'Design and fabrication of enhanced lateral growth for dislocation reduction and strain management in GaN using nanodashes'

This dataset contains the results of scanning electron microscopy (SEM) secondary electron (SE) images, panchromatic cathodoluminescence (CL) imaging and Electron Channelling Contrast Imaging (ECCI) and Raman spectroscopy on GaN epitaxial layers. These techniques were used to assess the morphology of the GaN crystal growth, and the dislocation density and strain in planar layers.

Keywords:
Optoelectronics, Materials, Gallium Nitride, Characterization, Cathodoluminescence, Dislocation, nanostructures
Subjects:

Cite this dataset as:
Shields, P., Le Boulbar, E., Priesol, J., Šatka, A., Allehiani, N., Naresh-Kumar, G., Fox, S., Trager-Cowan, C., 2017. Dataset for 'Design and fabrication of enhanced lateral growth for dislocation reduction and strain management in GaN using nanodashes'. University of Bath. https://doi.org/10.15125/BATH-00257.

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Data

Fig_1ae_D0604_P ... c_x30k_anno.bmp
image/x-ms-bmp (308kB)
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Secondary electron image of the growth window used in fig1a and 1e

Fig1b_2793_P3c1_x30k.bmp
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Secondary electron image of the growth used in fig1b

Fig1c_2794_P4c1_x30k.bmp
image/x-ms-bmp (308kB)
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Secondary electron image of the growth used in fig1c

Fig1d_2795_P6c1_x30k.bmp
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Secondary electron image of the growth used in fig1d

Fig1f_2793_P3c7_x30k.bmp
image/x-ms-bmp (308kB)
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Secondary electron image of the growth used in fig1f

Fig1g_2794_P4c7_x30k.bmp
image/x-ms-bmp (308kB)
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Secondary electron image of the growth used in fig1g

Fig1h_2795_P6c7_x30k.bmp
image/x-ms-bmp (308kB)
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Secondary electron image of the growth used in fig1h

fig3a_pendeo_te ... ge_region_A.bmp
image/x-ms-bmp (1MB)
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Secondary Electron Image of the pendeo template region A used for figure 3a

fig3b_pendeo_te ... ge_region_B.bmp
image/x-ms-bmp (4MB)
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Secondary Electron Image of the pendeo template region B used for figure 3a

fig3c_pendeo_te ... ge_region_D.bmp
image/x-ms-bmp (1MB)
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Secondary Electron Image of the pendeo template region D used for figure 3c

fig3d_ELOG_temp ... ge_region_A.bmp
image/x-ms-bmp (1MB)
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Secondary Electron Image of the ELOG template region A used for figure 3d

fig3e_ELOG_temp ... ge_region_C.bmp
image/x-ms-bmp (1MB)
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Secondary Electron Image of the ELOG template region C used for figure 3e

fig3f_ELOG_temp ... ge_region_E.bmp
image/x-ms-bmp (4MB)
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Secondary Electron Image of the ELOG template region E used for figure 3f

fig4a_ELOGtemplate_regionE.bmp
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Secondary Electron Image of the ELOG template region E used for figure 4a

fig4b_GaNgrowth ... E_step20min.bmp
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Secondary Electron Image of the GaN growth (20min) obtained on the ELOG template region E used for figure 4b

fig4c_GaNgrowth ... E_step20min.bmp
image/x-ms-bmp (4MB)
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Secondary Electron Image of the GaN growth (20min) obtained on the ELOG template region E used for figure 4c

fig4d_GaNgrowth ... E_step40min.bmp
image/x-ms-bmp (1MB)
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Secondary Electron Image of the GaN growth (40min) obtained on the ELOG template region E used for figure 4e

fig4e_GaNgrowth ... step_200min.bmp
image/x-ms-bmp (4MB)
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Secondary Electron Image of the GaN growth (200min) obtained on the ELOG template region E used for figure 4e

fig4f_GaNgrowth ... step_440min.bmp
image/x-ms-bmp (4MB)
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Secondary Electron Image of the GaN growth (440min) obtained on the ELOG template region E used for figure 4f

fig4g_GaNgrowth ... _step560min.bmp
image/x-ms-bmp (4MB)
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Secondary Electron Image of the GaN growth (560min) obtained on the ELOG template region E used for figure 4g

fig4h_GaNgrowth ... _step560min.bmp
image/x-ms-bmp (4MB)
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Secondary Electron Image of the GaN growth (560min) obtained on the ELOG template region E used for figure 4h

fig4i_GaNgrowth ... _step800min.bmp
image/x-ms-bmp (4MB)
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Secondary Electron Image of the GaN growth (800min) obtained on the ELOG template region E used for figure 4i

4_1k_3260npe.bmp
image/x-ms-bmp (4MB)
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Fig5a_Cathodolu ... age_regionD.jpg
image/jpeg (184kB)
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Cathodoluminescence Image of the GaN growth (800min) obtained on the ELOG template region D used for figure 5a

Fig5b_SEM_Regio ... thstep20min.bmp
image/x-ms-bmp (4MB)
Creative Commons: Attribution 4.0

Secondary Electron Image of the GaN growth (20min) obtained on the ELOG template region D used for figure 5b

Fig5c_SEM_Regio ... hstep200min.bmp
image/x-ms-bmp (4MB)
Creative Commons: Attribution 4.0

Secondary Electron Image of the GaN growth (200min) obtained on the ELOG template region D used for figure 5c

fig6a_panchroma ... eo_region_A.jpg
image/jpeg (179kB)
Creative Commons: Attribution 4.0

Panchromatic cathodoluminescence Image GaN layer obtained on the pendeo template region A used for figure 6a

fig6b_panchroma ... eo_region_B.jpg
image/jpeg (163kB)
Creative Commons: Attribution 4.0

Panchromatic cathodoluminescence Image GaN layer obtained on the pendeo template region B used for figure 6b

fig6c_panchroma ... eo_region_C.jpg
image/jpeg (148kB)
Creative Commons: Attribution 4.0

Panchromatic cathodoluminescence Image GaN layer obtained on the pendeo template region C used for figure 6c

fig6d_panchroma ... eo_region_D.jpg
image/jpeg (191kB)
Creative Commons: Attribution 4.0

Panchromatic cathodoluminescence Image GaN layer obtained on the pendeo template region D used for figure 6d

fig6e_panchroma ... OG_region_A.jpg
image/jpeg (177kB)
Creative Commons: Attribution 4.0

Panchromatic cathodoluminescence Image GaN layer obtained on the ELOG template region A used for figure 6e

fig6f_panchroma ... OG_region_B.jpg
image/jpeg (150kB)
Creative Commons: Attribution 4.0

Panchromatic cathodoluminescence Image GaN layer obtained on the ELOG template region B used for figure 6f

fig6g_panchroma ... OG_region_C.jpg
image/jpeg (238kB)
Creative Commons: Attribution 4.0

Panchromatic cathodoluminescence Image GaN layer obtained on the ELOG template region C used for figure 6g

fig6h_panchroma ... OG_region_E.jpg
image/jpeg (158kB)
Creative Commons: Attribution 4.0

Fig7a_Panchroma ... ELOG_sample.jpg
image/jpeg (212kB)
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Panchromatic cathodoluminescence Image GaN layer obtained on the ELOG template region D used for figure 7a

fig7b_ECCI_imag ... egionD_ELOG.png
image/png (396kB)
Creative Commons: Attribution 4.0

Electron Channelling Contrast Image of the GaN layer obtained on the ELOG template region D used for figure 7b

panchromaticCL_ ... ionA_pendeo.jpg
image/jpeg (139kB)
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Panchromatic Cathodoluminescence image obtained on the region A on the pendeo template. Used to calculate dislocation density reported in Fig8

panchromaticCL_ ... ionB_pendeo.jpg
image/jpeg (185kB)
Creative Commons: Attribution 4.0

panchromaticCL_ ... ionC_pendeo.jpg
image/jpeg (190kB)
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Panchromatic Cathodoluminescence image obtained on the region C on the pendeo template. Used to calculate dislocation density reported in Fig8

panchromaticCL_ ... ionD_pendeo.jpg
image/jpeg (191kB)
Creative Commons: Attribution 4.0

Panchromatic Cathodoluminescence image obtained on the region D on the pendeo template. Used to calculate dislocation density reported in Fig8

Panchromatic_CL_RegionA_i.jpg
image/jpeg (248kB)
Creative Commons: Attribution 4.0

Panchromatic Cathodoluminescence image obtained on the region A on the ELOG template. Used to calculate dislocation density reported in Fig8

Panchromatic_CL_RegionA_j.jpg
image/jpeg (249kB)
Creative Commons: Attribution 4.0

Panchromatic Cathodoluminescence image obtained on the region A on the ELOG template. Used to calculate dislocation density reported in Fig8

Panchromatic_CL_RegionA_k.jpg
image/jpeg (241kB)
Creative Commons: Attribution 4.0

Panchromatic Cathodoluminescence image obtained on the region A on the ELOG template. Used to calculate dislocation density reported in Fig8

Panchromatic_CL_RegionA_l.jpg
image/jpeg (265kB)
Creative Commons: Attribution 4.0

Panchromatic_CL_RegionA_m.jpg
image/jpeg (238kB)
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Panchromatic Cathodoluminescence image obtained on the region A on the ELOG template. Used to calculate dislocation density reported in Fig8

Panchromatic_CL_RegionB_j.jpg
image/jpeg (179kB)
Creative Commons: Attribution 4.0

Panchromatic Cathodoluminescence image obtained on the region B on the ELOG template. Used to calculate dislocation density reported in Fig8

Panchromatic_CL_RegionB_k.jpg
image/jpeg (169kB)
Creative Commons: Attribution 4.0

Panchromatic Cathodoluminescence image obtained on the region B on the ELOG template. Used to calculate dislocation density reported in Fig8

Panchromatic_CL_RegionB_l.jpg
image/jpeg (155kB)
Creative Commons: Attribution 4.0

Panchromatic Cathodoluminescence image obtained on the region B on the ELOG template. Used to calculate dislocation density reported in Fig8

Panchromatic_CL_RegionC_e.jpg
image/jpeg (252kB)
Creative Commons: Attribution 4.0

Panchromatic Cathodoluminescence image obtained on the region C on the ELOG template. Used to calculate dislocation density reported in Fig8

Panchromatic_CL_RegionC_f.jpg
image/jpeg (238kB)
Creative Commons: Attribution 4.0

Panchromatic Cathodoluminescence image obtained on the region C on the ELOG template. Used to calculate dislocation density reported in Fig8

Panchromatic_CL_RegionC_g.jpg
image/jpeg (328kB)
Creative Commons: Attribution 4.0

Panchromatic Cathodoluminescence image obtained on the region C on the ELOG template. Used to calculate dislocation density reported in Fig8

Panchromatic_CL_RegionC_h.jpg
image/jpeg (327kB)
Creative Commons: Attribution 4.0

Panchromatic Cathodoluminescence image obtained on the region C on the ELOG template. Used to calculate dislocation density reported in Fig8

Panchromatic_CL_RegionC_i.jpg
image/jpeg (357kB)
Creative Commons: Attribution 4.0

Panchromatic Cathodoluminescence image obtained on the region C on the ELOG template. Used to calculate dislocation density reported in Fig8

Panchromatic_CL_RegionC_j.jpg
image/jpeg (378kB)
Creative Commons: Attribution 4.0

Panchromatic Cathodoluminescence image obtained on the region C on the ELOG template. Used to calculate dislocation density reported in Fig8

Panchromatic_CL_RegionD_f.jpg
image/jpeg (191kB)
Creative Commons: Attribution 4.0

Panchromatic Cathodoluminescence image obtained on the region D on the ELOG template. Used to calculate dislocation density reported in Fig8

Panchromatic_CL_RegionD_g.jpg
image/jpeg (212kB)
Creative Commons: Attribution 4.0

Panchromatic_CL_RegionD_h.jpg
image/jpeg (225kB)
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Panchromatic Cathodoluminescence image obtained on the region D on the ELOG template. Used to calculate dislocation density reported in Fig8

Panchromatic_CL_RegionD_i.jpg
image/jpeg (242kB)
Creative Commons: Attribution 4.0

Panchromatic Cathodoluminescence image obtained on the region D on the ELOG template. Used to calculate dislocation density reported in Fig8

Panchromatic_CL_RegionD_j.jpg
image/jpeg (154kB)
Creative Commons: Attribution 4.0

Panchromatic Cathodoluminescence image obtained on the region D on the ELOG template. Used to calculate dislocation density reported in Fig8

Panchromatic_CL_RegionD_k.jpg
image/jpeg (168kB)
Creative Commons: Attribution 4.0

Panchromatic Cathodoluminescence image obtained on the region D on the ELOG template. Used to calculate dislocation density reported in Fig8

Panchromatic_CL_RegionE_d.jpg
image/jpeg (162kB)
Creative Commons: Attribution 4.0

Panchromatic_CL_RegionE_e.jpg
image/jpeg (201kB)
Creative Commons: Attribution 4.0

Panchromatic Cathodoluminescence image obtained on the region E on the ELOG template. Used to calculate dislocation density reported in Fig8

Panchromatic_CL_RegionE_f.jpg
image/jpeg (158kB)
Creative Commons: Attribution 4.0

Panchromatic_CL_RegionE_f.jpg
image/jpeg (158kB)
Creative Commons: Attribution 4.0

Panchromatic_CL_RegionE_g.jpg
image/jpeg (188kB)
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Panchromatic Cathodoluminescence image obtained on the region E on the ELOG template. Used to calculate dislocation density reported in Fig8

Panchromatic_CL_RegionE_h.jpg
image/jpeg (156kB)
Creative Commons: Attribution 4.0

Panchromatic Cathodoluminescence image obtained on the region E on the ELOG template. Used to calculate dislocation density reported in Fig8

Panchromatic_CL_RegionE_i.jpg
image/jpeg (200kB)
Creative Commons: Attribution 4.0

Panchromatic Cathodoluminescence image obtained on the region E on the ELOG template. Used to calculate dislocation density reported in Fig8

Panchromatic_CL_RegionE_j.jpg
image/jpeg (179kB)
Creative Commons: Attribution 4.0

Panchromatic Cathodoluminescence image obtained on the region E on the ELOG template. Used to calculate dislocation density reported in Fig8

Panchromatic_CL_RegionE_k.jpg
image/jpeg (189kB)
Creative Commons: Attribution 4.0

Panchromatic Cathodoluminescence image obtained on the region E on the ELOG template. Used to calculate dislocation density reported in Fig8

Panchromatic_CL_RegionE_k.jpg
image/jpeg (189kB)
Creative Commons: Attribution 4.0

Panchromatic Cathodoluminescence image obtained on the region E on the ELOG template. Used to calculate dislocation density reported in Fig8

Panchromatic_CL_RegionE_l.jpg
image/jpeg (191kB)
Creative Commons: Attribution 4.0

Panchromatic Cathodoluminescence image obtained on the region E on the ELOG template. Used to calculate dislocation density reported in Fig8

Fig8_ELOG_pende ... s_raw_data.xlsx
application/vnd.openxmlformats-officedocument.spreadsheetml.sheet (13kB)
Creative Commons: Attribution 4.0

Raw data used to draw figure 8

Fig9_raw_data_p ... _E2h_Raman.xlsx
application/vnd.openxmlformats-officedocument.spreadsheetml.sheet (9kB)
Creative Commons: Attribution 4.0

Raw data used to draw figure 9

Fig2a_AreaVsGrowthTimeData.txt
text/plain (285B)
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Data used to plot Figure 2a

Fig2b_AreaVsangle.txt
text/plain (359B)
Creative Commons: Attribution 4.0

Data used to plot Figure 2b

Creators

Philip Shields
University of Bath

Emmanuel Le Boulbar
University of Bath

J. Priesol
Slovak University of Technology

A. Šatka
Slovak University of Technology

N. Allehiani
University of Strathclyde

G. Naresh-Kumar
University of Strathclyde

Sophia Fox
University of Bath

C. Trager-Cowan
University of Strathclyde

Contributors

Duncan Allsopp
Supervisor
University of Bath

University of Bath
Rights Holder

Coverage

Collection date(s):

From 2010 to 2012

Documentation

Technical details and requirements:

Secondary electron images were captured using a Hitachi S-4300 scanning electron microscope (SEM). An accelerating voltage of 5 kV was used to collect the images. A field-emission gun scanning electron microscopey (SEM) LEO1550 combined with a cathodoluminescence (CL) Gatan MonoCL4 detection system was employed. An electron acceleration voltage of 5 kV and a beam current below 1 nA were used to avoid the radiation damage and preserve the lateral resolution during the panchromatic SEM CL imaging. MOVPE growth were performed in a horizontal flow Aixtron 200/4HT RF-S reactor. The templates were prepared using a nanoimprinting stamp, whic was replicate on the wafer using acrylate. Chlorine/Argon chemistry was used in order to etched GaN dashes to obtain the pendeo template. CHF3 chemistry was used in order to open GaN dashes windows and obtain the ELOG template.

Funders

European Commission (EC)
https://doi.org/10.13039/501100000780

SMASH
228999

Engineering and Physical Sciences Research Council (EPSRC)
https://doi.org/10.13039/501100000266

Manufacturing of Nano-Engineered III-N Semiconductors
EP/M015181/1

Publication details

Publication date: March 2017
by: University of Bath

Version: 1

DOI: https://doi.org/10.15125/BATH-00257

URL for this record: https://researchdata.bath.ac.uk/id/eprint/257

Related articles

Le Boulbar, E.D., Priesol, J., Nouf-Allehiani, M., Naresh-Kumar, G., Fox, S., Trager-Cowan, C., Šatka, A., Allsopp, D.W.E. and Shields, P.A., 2017. Design and fabrication of enhanced lateral growth for dislocation reduction in GaN using nanodashes. Journal of Crystal Growth, 466, pp.30-38. Available from: https://doi.org/10.1016/j.jcrysgro.2017.02.047.

Contact information

Please contact the Research Data Service in the first instance for all matters concerning this item.

Contact person: Philip Shields

Departments:

Faculty of Engineering & Design
Electronic & Electrical Engineering