Hybrid top-down/bottom-up fabrication of regular arrays of AlN nanorods for deep-UV core-shell LEDs: Dataset

Hybrid top-down/bottom-up fabrication of regular arrays of AlN nanorods for deep-UV core-shell LEDs: Dataset

This dataset contains scanning electron microscopy (SEM) images and Catodoluminescence (CL) measurements carried out on AlN nanorod. The samples were fabricated via a hybrid top-down/bottom up approach. Displacement Talbot Lithography is used to fabricate Au/Ni metal dots to act as a hard etch mask. AlN nanorod arrays are created by inductively coupled plasma dry etching of an AlN template. AlN facet recovery is performed by Metal Organic Vapor Phase Epitaxy regrowth. CL was used to assess the optical quality of the AlN nanorod.

Cite this dataset as:
Coulon, P., Kusch, G., 2017. Hybrid top-down/bottom-up fabrication of regular arrays of AlN nanorods for deep-UV core-shell LEDs: Dataset. University of Bath. https://doi.org/10.15125/BATH-00415.

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Creators

Pierre-Marie Coulon
University of Bath

Gunnar Kusch
Researcher
University of Strathclyde

Contributors

Emmanuel Le Boulbar
Researcher
University of Bath

Pierre Chausse
Other
University of Bath

Christopher Bryce
Other
University of Strathclyde

Robert Martin
Project Member
University of Strathclyde

Philip Shields
Project Leader
University of Bath

University of Bath
Rights Holder

Documentation

Data collection method:

Secondary electron images were captured using a Hitachi S-4300 scanning electron microscope (SEM). An accelerating voltage of 5 kV was used to collect the images. Cathodoluminescence spectroscopy was carried out at room temperature in a modified FEI Quanta 250 field emission SEM with various accelerating voltages. Light was collected using an NA0.28 reflecting objective with its axis perpendicular to the electron beam and focused directly to the entrance of the spectrograph using an off-axis paraboloidal mirror. We used a 125 mm focal length spectrograph with a 600 lines/mm grating and 50 μm entrance slit, coupled to a cooled electron multiplying charge-coupled device (EMCCD) detector.

Funders

Engineering and Physical Sciences Research Council (EPSRC)
https://doi.org/10.13039/501100000266

Manufacturing of Nano-Engineered III-N Semiconductors
EP/M015181/1

Publication details

Publication date: 2017
by: University of Bath

Version: 1

DOI: https://doi.org/10.15125/BATH-00415

URL for this record: https://researchdata.bath.ac.uk/id/eprint/415

Related articles

Coulon, P.-M., Kusch, G., Le Boulbar, E. D., Chausse, P., Bryce, C., Martin, R. W. and Shields, P. A., 2017. Hybrid Top-Down/Bottom-Up Fabrication of Regular Arrays of AlN Nanorods for Deep-UV Core-Shell LEDs. physica status solidi (b), 255(5), p.1700445. Available from: https://doi.org/10.1002/pssb.201700445.

Contact information

Please contact the Research Data Service in the first instance for all matters concerning this item.

Contact person: Pierre-Marie Coulon

Departments:

Faculty of Engineering & Design
Electronic & Electrical Engineering