Data set for "Creation of regular arrays of faceted AlN nanostructures via a combined top-down, bottom-up approach"

Data collection method:

AlN nanostructures were fabricated and then MOVPE regrowth experiments were performed upon different regrown nanostructures. The data taken in the main text was in the form of SEM images. Other than figure 5, these were taken with a Hitachi Field-Emission S-4300 SE using a 5 kV electron beam using secondary electron detection. Figure 5 was taken with a FEI Quanta 250 variable pressure SEM, again detecting the secondary electron signal. The AFM images in the supplementary information were taken using a Bruker multimode IIIA AFM, utilising high resolution, high aspect ratio AFM tips.

Data processing and preparation activities:

Some of the SEM images were modified to have different contrast and brightness levels compared to the original images taken. Also, the images were cropped to remove the bottom and a scale bar inserted in to make them more aesthetically pleasing. The AFM images in the supplementary material were calibrated to be scaled properly as the raw data was distorted to some extent.

Technical details and requirements:

All SEM images (Figure 1-4, 7) apart from Figure 5 were taken with a Hitachi Field-Emission S-4300 SE using a 5 kV electron beam using secondary electron detection. Figure 5 was taken with a FEI Quanta 250 variable pressure SEM, detecting the secondary electron signal. Blender 2.83 was used to produce the 3-dimensional growth mechanism schematics in Figure 6. ImageJ 1.52a was used to extract quantitative data from the SEM images - this was presented in the two plots presented in the main text and supplementary information respectively (Figure 8 and Figure 12 supplementary information). The actual plotting of the data itself was performed using the Origin 8.5.1 software package. The AFM images presented in the supplementary material (Figures 9-11 supplementary material) were calibrated and analysed using the Gwyddion 2.55 software package (http://gwyddion.net/).

Additional information:

The data is organised in order according to each of the Figures presented in the associated publication and supplementary information.