Dataset for "Optimisation of processing conditions during CVD growth of 2D WS2 films from a chloride precursor"
The dataset represents the results of a CVD growth study of monolayer WS2 films on sapphire substrates and underpins the figures in the main manuscript of "Optimisation of processing conditions during CVD growth of 2D WS2 films from a chloride precursor" that has appeared in the Journal of Materials Science. The manuscript describes an annealing protocol that was developed for the Oxford Instruments Nanofab cold wall CVD reactor to optimise the optical properties of the films. The improvement in quality is demonstrated through a systematic analysis of Raman and photoluminescence spectra and line shapes, including 2D maps generated across large area samples. Atomic force microscopy is used to confirm that the films are indeed uniform single monolayers. Finally, a wet transfer process from sapphire to Si/SiO2 substrates is used to demonstrate that the quality of the films remains unaffected.
Cite this dataset as:
Campbell, W.,
Reale, F.,
Ravi, S.,
Bending, S.,
2022.
Dataset for "Optimisation of processing conditions during CVD growth of 2D WS2 films from a chloride precursor".
Bath: University of Bath Research Data Archive.
Available from: https://doi.org/10.15125/BATH-01104.
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Data
Data for archiveF.zip
application/zip (15MB)
Creative Commons: Attribution 4.0
Datasets underpinning manuscript "Optimisation of processing conditions during CVD growth of 2D WS2 films from a chloride precursor"
Creators
William Campbell
University of Bath
Francesco Reale
Oxford Instruments
Sundaram Ravi
Oxford Instruments
Simon Bending
University of Bath
Contributors
University of Bath
Rights Holder
Oxford Instruments Plasma Technology
Rights Holder
Coverage
Collection date(s):
From 1 October 2017 to 31 December 2020
Documentation
Data collection method:
Data either represent the raw experimental datafiles as captured with our measurement apparatus, or parameters extracted directly from these raw data files using standard fitting practices.
Technical details and requirements:
Samples were grown in an Oxford Instruments Nanofab cold-wall CVD reactor. Raman and photoluminescence data were collected using a Renishaw inVia confocal Raman microscope and AFM images were captured with an Asylum MFP-3D atomic force microscope in non-contact mode.
Additional information:
All data uploaded as readily accessible text or Excel files.
Documentation Files
README.txt
text/plain (1kB)
README file describing the data formatting in the file data for archiveF.zip
Funders
Engineering and Physical Sciences Research Council
https://doi.org/10.13039/501100000266
EPSRC Centre for Doctoral Training in Condensed Matter Physics
EP/L015544/1
Publication details
Publication date: 3 January 2022
by: University of Bath
Version: 1
DOI: https://doi.org/10.15125/BATH-01104
URL for this record: https://researchdata.bath.ac.uk/id/eprint/1104
Related papers and books
Campbell, W. R., Reale, F., Sundaram, R., and Bending, S. J., 2022. Optimisation of processing conditions during CVD growth of 2D WS2 films from a chloride precursor. Journal of Materials Science, 57(2), 1215-1229. Available from: https://doi.org/10.1007/s10853-021-06708-1.
Contact information
Please contact the Research Data Service in the first instance for all matters concerning this item.
Contact person: William Campbell
Faculty of Science
Physics
Research Centres & Institutes
Centre for Nanoscience and Nanotechnology
Condensed Matter Physics CDT
